硅片湿法清洗技术与设备---华林科纳CSE

硅片制造过程中，在进行下一步工艺前要获得 一个洁净的表面，以保证后道工艺能再一个完全洁 净的表面上进行，这就需要对硅片进行清洗。清洗是硅片制造过程中重复次数最多的工艺。目前，在 清洗工艺中使用最多的就是湿法清洗技术，华林科纳半导体设备公司的硅片湿法腐蚀清洗机在半导体行业得到了很多客户的认可.

1 GUIPIANSHIFAQINGXIDEZHONGLEI

1.1 SHUAXI SHUAXISHIQUCHUGUIPIANBIAOMIANKELIDEYIZHONGZHIJIEERYOUXIAO DEFANGFA，GAIQINGXIJISHUYIBANYONGZAIQIEGEHUOPAOGUANGHOUDEGUIPIAN QINGXISHANG，KEGAOXIAODIQINGCHUPAOGUANGHOUCHANSHENGDEDALIANGKELI。SHUA XIYIBANYOUDANMIANHUOSHUANGMIANLIANGZHONGMOSHI，SHUANGMIANMOSHIKETONGSHIQING XIGUIPIANDELIANGMIAN。SHUAXIYOUSHIYEYUCHAOSHENGJIQULIZISHUIHUOHUA XUEYEYIQIPEIHESHIYONG，YIDADAOGENGHAODEQINGXIXIAOGUOHEGENGGAO DEQINGXIXIAOLV。 1.2 HUAXUEQINGXI 1.2.1 RCA QINGXI 20 SHIJI 60 NIANDAI，YOUMEIGUOWUXIANDIANGONGSI（RCA）YAN FALEYONGYUGUIPIANQINGXIDE RCA QINGXIJISHU，ZHEIZHONGJISHUCHENG WEIHOULAIGEZHONGHUAXUEQINGXIJISHUDEJICHU，XIANZAIDADUOSHUGONGCHANG SUOSHIYONGDEQINGXIJISHUDOUSHIJIYUZUICHUDE RCA QINGXIFA。 RCA QINGXISHIANZHAOYIDINGDESHUNXUYICIJINRULIANGZHONGBIAO ZHUNQINGXIYE(SC-1 HE SC-2)ZHONGLAIWANCHENG，ZHEILIANGZHONGQINGXIYEDESHIYONGWENDUYIBANZAI 80 ℃YINEI，YOUSHIYEXUYAOJIANGRONGYE LENGQUEDAOSHIWENYIXIA。

1.2.2 GAIJINDE RCA QINGXI

RCA QINGXIYIBANDOUXUYAOZAIGAOWENXIAJINXING，BINGQIEHUA XUEYEDENONGDUHENGAO，ZHEIYANGJIUZAOCHENGDALIANGXIAOHAOHUAXUEYEHEQU LIZISHUIDEWENTI。MUQIAN，HENSHAOYOURENHAIANZHAOZUICHUDE RCA HUAXUEYEPEIBIJINXINGSHIFAQINGXI。 ZAI RCA QINGXIDEJICHUSHANG，CAIYONGXISHIHUAXUEFA，JIANG SC-1、SC-2 XISHIDAO 100 BEIYISHANG，YEKEYIDADAOSHENZHICHAO GUOZUICHUDE RCA QINGXIXIAOGUO。GAIJINDE RCA QINGXIFANGFAZUI DADEHAOCHUSHIJIANSHAOLEHUAXUEYEDEXIAOHAO，KESHIHUAXUEYEDEXIAO HAOLIANGJIANSHAO 85﹪YISHANG。LINGWAI，FUJIAZHAOSHENGHUOCHAOSHENGNENGLIANG HOU，KEDADAJIANGDIRONGYEDESHIYONGWENDUHEFANYINGSHIJIAN，TIGAO RONGYEDESHIYONGSHOUMING，DAFUDUJIANGDILESHENGCHANCHENGBEN，TONGSHI，DI NONGDUHUAXUEYEDUIRENTIJIANKANGHEANQUANFANGMIANDOUSHIYOUHAOCHUDE。

1.2.3 ZIRANYANGHUACENGDEQUCHU

GUIPIANJINGGUOQINGXIYEDEYANGHUAHUOBAOLUYUKONGQIZHONG，HUIZAI GUIPIANBIAOMIANXINGCHENGYICENGYANGHUAMO，CHENGWEIZIRANYANGHUACENG。ZAIJIN XINGWAIYANQIANBIXUJIANGZHEIYICENGZIRANYANGHUACENGQUCHU，YIBANSHIYONG HF JINXINGQINGXI，HF QINGXIYEDEPEIBIWEI HF:H2O=1:10~1: 100。ZAIJINXINGXIAYIDAOGONGYIQIAN，HF QINGXIYIBANSHIZUIHOUYI DAOQINGXI。JINGGUO HF DEJINPAOHOU，GUIPIANBIAOMIANXINGCHENGWENDING H-SI JIAN，ZAIKONGQIZHONGJUYOUJIAOGAODEWENDINGXING，BIMIANLEZAICI BEIYANGHUA。

2 SHIFAQINGXISHEBEIHUOZHUANGZHI

2.1 HUAXUEQINGXICAO CONGCAIZHISHANGLAISHUOYIBANYOU NPP、PVDF、PTFE、SHIYING BOLIDENG。ZAISHIYONGSHIGENJUHUAXUEYEDENONGDU、SUANJIANDU、SHIYONG WENDUDENGTIAOJIANXUANZEXIANGYINGDECAOTICAILIAO。LIRU：NPP YIBAN YONGZAICHANGWENXIADERUOSUANRUOJIANQINGXI，PVDF、PTFE、SHIYINGBO LIDENGYIBANYONGZAIXUJIAREDEQIANGSUANQIANGJIANQINGXI，QIZHONGSHIYINGBO LIBUNENGYONGZAI HF DEQINGXIZHONG。CHANGWENHUAXUECAO，YIBANWEI NPP CAILIAO。TU 1 WEISHIYINGJIARECAO，CAONEIRONGYEKEJIAREDAO 180 ℃SHENZHIGENGGAO，TAYIBANYOUSHIYINGNEICAO、BAOWENCENG、SULIAO (PP)WAICAOZUCHENG。SHIYINGCAOJIAREKEYITONGGUOZHANTIEJIAREMOHUO ZHEZHIJIEZAISHIYINGBOLISHANGTUFUJIARECAILIAOSHIXIAN。SHIYINGCAONEI XUANZHUANGWENDUHEYEWEICHUANGANQI，YISHIXIANDUIWENDUDEJINGQUEKONG ZHIYIJICAONEIYEWEIDEJIANCE，FANGZHICAONEIYEWEIGUODIZAOCHENGJIA REQIGANSHAO。TU 2 WEI PVDF(PTFE)JIARECAO，ZHEILEIJIARE CAOCHANGYONGYU HF RONGYEDEQINGXIZHONG。YOUYUSHOUDAOCAOTICAILIAODE XIANZHI，ZHEILEIJIARECAOZHINENGSHIYONGQIANRUSHIJIARE，QIANRUSHIJIA REQIYIBANYOUPANGUANSHIHEPINGBANSHILIANGZHONG，JIAREQIWAIBAOFU PFA GUAN。

2.2 ZHAOSHENGQINGXICAO RCA HUOZHEGAIJINDE RCA QINGXIPEIHEZHAOSHENGNENGLIANGSHI MUQIANSHIYONGFEICHANGGUANGFANDEQINGXIFANGFA。ZAIFUJIALEZHAOSHENGNENGLIANG HOU，KEDAFUJIANGDIRONGYEDESHIYONGWENDUYIJIGONGYISHIJIAN，ER QINGXIXIAOGUOGENGJIAYOUXIAO。CHANGYONGZHAOSHENGQINGXIDEPINLVWEI 800 kHz~1 MHz，ZHAOSHENGGONGLVZAI 100～600 W。

ZHAOSHENGHUANNENGQIYOUPINGBANSHI、YUANHUBANSHIDENGXINGSHI。ZHAOSHENG HUANNENGQIKEZHIJIEANZHUANGYUCAOTIDIBU，SHIYINGQINGXICAOZEKEYI CAIYONGSHUIYUDEFANGSHI，ZHAOSHENGHUANNENGQIANZHUANGYUWAICAODIBU，ZHEI YANGKEYIBIMIANQINGXIYEDUIZHAOSHENGHUANNENGQIDEQINSHI。QIJIEGOURU TU 3 SUOSHI。ZHAOSHENGHUANNENGQIZAIGONGZUOGUOCHENGZHONGHUIZAISHIYINGCAODI BUCHANSHENGDALIANGDEQIPAO，ZHEIXIEQIPAOHUIDALIANGXISHOUZHAOSHENGNENG LIANG，DADAJIANGDILEZHAOSHENGQINGXIDEXIAOGUO，YINCINEICAOSHIYINGGANG DIBUYIBANYAOYOU 10~15(°)DEQINGXIEJIAODU，DANGYOUQIPAOCHAN SHENGSHI，YOUYUFULIDEZUOYONGQIPAOYANQINGXIEDESHIYINGCAODIXIANGSHANG YIDONG，TUOLISHIYINGCAOBIFUCHUSHUIMIAN，JIANSHAOLEQIPAODUIZHAOSHENG NENGLIANGDESUNHAO。LINGWAISHUIYUWAICAOKEGENJUBUTONGDEXUYAOCAIYONG BUXIUGANGCAO、SHIYINGCAODENG。

YUANHUBANZHAOSHENGHUANNENGQIYOUYUQIJIEGOUDETESHUXING，SHIQI ZAIZHAOSHENGNENGLIANGDECHUANBOFANGXIANG、NENGLIANGFENBUSHANGGENGJIAHELI，QING XIXIAOGUOGENGJIAXIANZHU，YIBANQINGKUANGXIA，YUANHUBANZHAOSHENGHUANNENGQI ZHIXUYAOPINGBANZHAOSHENGHUANNENGQIYIBANDEGONGLVJIKEDADAOXIANGTONG DEQINGXIXIAOGUO，JIANTU 4。

2.3 XUANZHUANPENLINQINGXI XUANZHUANPENLINQINGXIXITONGYIBANBAOKUOZIDONGPEIYEXITONG、QING XIQIANGTI、FEIYEHUISHOUXITONGZUCHENG。QINGXIQIANGJIEGOURUTU 5 SUO SHI，QINGXIGONGYIGUOCHENGRUTU 6 SUOSHI。

PENLINQINGXIZAIYIGEMIFENGDEGONGZUOQIANGNEIYICIWANCHENGHUA XUEQINGXI、QULIZISHUICHONGXI、XUANZHUANSHUAIGANDENGGUOCHENG，DUIGUIPIANLAI SHUOSHIYIGE Dry-to-Dry DEGUOCHENG，JIANSHAOLEZAIMEIYIBUDEQING XIGUOCHENGZHONGYOUYURENWEICAOZUOYINSUZAOCHENGDEYINGXIANG。ZAIPENLINQING XIZHONGYOUYUXUANZHUANHEPENLINDEXIAOGUO，SHIDEGUIPIANBIAOMIANDERONGYE GENGJIAJUNYUN，TONGSHI，JIECHUDAOGUIPIANBIAOMIANDERONGYEYONGYUANSHIXIN XIANDE，ZHEIYANGJIUKEYIZUODAOTONGGUOGONGYISHIJIANSHEZHI，JINGQUEKONG ZHIGUIPIANDEQINGXIFUSHIXIAOGUO，SHIXIANHENHAODEYIZHIXING。MIFENG DEGONGZUOQIANGKEYIGEJUEHUAXUEYEDEHUIFA，JIANSHAOLERONGYEDESUN HAOYIJIRONGYEZHENGQIDUIRENTIHEHUANJINGDEWEIHAI。 2.4 SHUAXIQI SHUAXIQIZHUYAOYONGYUGUIPIANPAOGUANGHOUDEQINGXI，KEYOUXIAODIQU CHU 1μm YISHANGDEKELI。QIJIEGOURUTU 7 SUOSHI。ZAOQISHIYONGDE NILONGMAOSHUAYIZAOCHENGGUIPIANDESUNSHANG，XIANZAIYIBANCAIYONGJUYIXICHUN (PVA)MAOSHUA，PVA MAOSHUAPEIHEQULIZISHUIHUOQINGXIYEDEPENSHEKEYOUXIAODIQUCHUKELIERBUSUNSHANGGUIPIANBIAO MIAN。YOUSHIYEHUISHIYONGCHAOSHENGPENZUI，YITIGAOQINGXIDEXIAOGUO。

2.4 SHUICHONGXICAO MEIWANCHENGYIBUHUAXUEQINGXIHOU，DOUYAOSHIYONGQULIZISHUIJIANG GUIPIANBIAOMIANDECANLIUWUQINGXIGANJING，ZAIGUOQUYIBANSHIYONGDANJI HUODUOJIYILIUCAOLAIWANCHENG，DANSHIYOUYUYILIUQINGXIXIANGDUIJIAODI DEYETILIUDONGXING，SHIDEQULIZISHUIDEHAOLIANGFEICHANGDA，TONGSHI QIQINGXIXIAOGUOYEBUNENGMANZUXIANDAIGONGYIDEYAOQIU，XIANZAIDUOSHI YONGKUAISUPAIFANGCHONGXICAOLAIJINXINGSHUICHONGXI，WEITIGAOCHONGXIDEXIAO GUO，ZAIKUAIPAICAONEIYEKEYIZENGJIAYILIU、DANQIGUPAODENGGONGNENG。

3 JIESHUYU SHIFAQINGXIZUOWEIGUIPIANZHIZAOGUOCHENGZHONGZHUYAODEQINGXIFANG FA，ZAIWEILAIYIDUANSHIJIANNEIRENGJIANGZHANYOUJUEDUITONGZHIDIWEI。TONG SHI，SUIZHEGUIPIANZHIZAOGONGYIJIEDIANDETISHENG，SHIFAQINGXIJISHU YEJIANGBUDUANDEGAIJIN，YISHIYINGXINGONGYIDEXUQIU。 

 山东彩票的半导体硅片湿法腐蚀www.hlcas.com），现在热线咨询400-8768-096可立即获取免费的半导体清洗解决方案。