SUIZHEJICHENGDIANLUZHICHENGGONGYIJIEDIANYUELAIYUEXIANJIN，DUISHIJIZHIZAODEJIGEHUANJIEYETICHULEXINYAOQIU，QINGXIHUANJIEDEZHONGYAOXINGRIYITUXIAN。
QINGXIDEGUANJIANXINGZESHIYOUYUSUIZHETEZHENGCHICUNDEBUDUANSUOXIAO，BANDAOTIDUIZAZHIHANLIANGYUELAIYUEMINGAN，ERBANDAOTIZHIZAOZHONGBUKEBIMIANHUIYINRUYIXIEKELI、YOUJIWU、JINSHUHEYANGHUAWUDENGWURANWU。WEILEJIANSHAOZAZHIDUIXINPIANLIANGLVDEYINGXIANG，SHIJISHENGCHANZHONGBUJINJINXUYAOTIGAODANCIDEQINGXIXIAOLV，HAIXUYAOZAIJIHUSUOYOUZHICHENGQIANHOUDOUPINFANDEJINXINGQINGXI，QINGXIBUZHOUYUEZHANZHENGTIBUZHOUDE33%。
JINTIAN《BANDAOTIXIAOKETANG》DAIDAJIAXISHUYIXIA，CHANGYONGDESIZHONGBANDAOTIGUIPIANQINGXISHEBEIJIZHUANGZHI：
![第二讲：四种常用的半导体硅片清洗设备及装置]( "第二讲：四种常用的半导体硅片清洗设备及装置")
1、JINRUSHISHIFAQINGXICAO
SHIFAHUAXUEQINGXIXITONGJIKEYISHIJINRUSHIDEYOUKEYISHIXUANZHUANSHIDE。YIBANSHEBEIZHUYAOBAOKUOYIZUSHIFAHUAXUEQINGXICAOHEXIANGYINGDESHUICAO，LINGWAIHAIKENENGPEIYOUSHUAIGANZHUANGZHI。GUIPIANFANGZAIYIGEQINGXIZHUANYONGHUALANZHONGFANGRENHUAXUECAOYIDUANZHIDINGDESHIJIAN，ZHIHOUQUCHUFANGRENDUIYINGDESHUICAOZHONGCHONGXI。
DUIYUQINGXISHEBEIDESHEJILAISHUO，CAILIAODEXUANZEZHIGUANZHONGYAO。SHIYONGSHIGENJUHUAXUEYEDENONGDU、SUANJIANDU、SHIYONGWENDUDENGTIAOJIANXUANZEXIANGYINGDECAOTICAILIAO。CONGCAIZHISHANGLAISHUOYIBANYOUNPP、PVDF、PrFE、SHIYINGBOLIDENG。LIRU：PVDF、IyIFE、SHIYINGBOLIDENGYIBANYONGZAIXUJIAREDEQIANGSUANQIANGJIANQINGXI，QIZHONGSHIYINGBOLIBUNENGYONGZAIHFQINGXIZHONG，NPPYIBANYONGZAICHANGWENXIADERUOSUANRUOJIANQINGXI。ERCHANGWENHUAXUECAO，YIBANWEINPPCAILIAO。
![第二讲：四种常用的半导体硅片清洗设备及装置]( "第二讲：四种常用的半导体硅片清洗设备及装置")
▲TU1 SHIYINGJIARECAO
CAONEIRONGYEKEJIAREDAO180℃SHENZHIGENGGAO，TAYIBANYOUSHIYINGNEICAO、BAOWENCENG、SULIAO(PP)WAICAOZUCHENG。SHIYINGCAOJIAREKEYITONGGUOZHANTIEJIAREMOHUOZHEZHIJIEZAISHIYINGBOLISHANGTUFUJIARECAILIAOSHIXIAN。SHIYINGCAONEIXUANZHUANGWENDUHEYEWEICHUANGANQI，YISHIXIANDUIWENDUDEJINGQUEKONGZHIYIJICAONEIYEWEIDEJIANCE，FANGZHICAONEIYEWEIGUODIZAOCHENGJIAREQIGANSHAO。
CHUCIZHIWAIPVDF(PTEE)JIARECAOYEJIAOWEICHANGYONG，ZHEILEIJIARECAOCHANGYONGYUHFRONGYEDEQINGXIZHONG。YOUYUSHOUDAOCAOTICAILIAODEXIANZHI，ZHEILEIJIARECAOZHINENGSHIYONGQIANRUSHIJIARE，QIANRUSHIJIAREQIYIBANYOUPANGUANSHIHEPINGBANSHILIANGZHONG，JIAREQIWAIBAOFUPFAGUAN。
2、ZHAOSHENGQINGXICAO
RcAHUOZHEGAIJINDERcAQINGXIPEIHEZHAOSHENGNENGLIANGSHIMUQIANSHIYONGFEICHANGGUANGFANDEQINGXIFANGFA。ZAIFUJIALEZHAOSHENGNENGLIANGHOU，KEDAFUJIANGDIRONGYEDESHIYONGWENDUYIJIGONGYISHIJIAN，ERQINGXIXIAOGUOGENGJIAYOUXIAO。CHANGYONGZHAOSHENGQINGXIDEPINLVWEI800kHz—1 MHz，ZHAOSHENGGONGLVZAI100YI600W。ZHAOSHENGHUANNENGQIYOUPINGBANSHI、YUANHUBANSHIDENGXINGSHI。ZHAOSHENGHUANNENGQIKEZHIJIEANZHUANGYUCAOTIDIBU；SHIYINGQINGXICAOZEKEYICAIYONGSHUIYUDEFANGSHI，ZHAOSHENGHUANNENGQIANZHUANGYUWAICAODIBU，ZHEIYANGKEYIBIMIANQINGXIYEDUIZHAOSHENGHUANNENGQIDEJINSHI。QIJIEGOURUTU2SUOSHI。
![第二讲：四种常用的半导体硅片清洗设备及装置]( "第二讲：四种常用的半导体硅片清洗设备及装置")
▲TU2 ZHAOSHENGCAO
ZHAOSHENGHUANNENGQIZAIGONGZUOGUOCHENGZHONGHUIZAISHIYINGCAODIBUCHANSHENGDALIANGDEQIPAO。ZHEIXIEQIPAOHUIDALIANGXISHOUZHAOSHENGNENGLIANG，DADAJIANGDILEZHAOSHENGQINGXIDEXIAOGUO。YINCINEICAOSHIYINGGANGDIBUYIBANYAOYOU10-15DUDEQINGXIEJIAODU，DANGYOUQIPAOCHANSHENGSHI，YOUYUFULIDEZUOYONGQIPAOYANQINGXIEDESHIYINGCAODIXIANGSHANGYIDONG，TUOLISHIYINGCAOBIFUCHUSHUIMIAN，JIANSHAOLEQIPAODUIZHAOSHENGNENGLIANGDESUNHAO。
LINGWAISHUIYUWAICAOKEGENJUBUTONGDEXUYAOCAIYONGBUXIUGANGCAO、SHIYINGCAODENG。YUANHUBANZHAOSHENGHUANNENGQIYOUYUQIJIEGOUDETESHUXING，SHIQIZAIZHAOSHENGNENGLIANGDECHUANBOFANGXIANG、NENGLIANGFENBUSHANGGENGJIAHELI，QINGXIXIAOGUOGENGJIAXIANZHU，YIBANQINGKUANGXIA，YUANHUBANZHAOSHENGHUANNENGQIZHIXUYAOPINGBANZHAOSHENGHUANNENGQISHIYONGJIANBANDEGONGLVJIKEDADAOXIANGTONGDEQINGXIXIAOGUO。
3、XUANZHUANPENLINQINGXI
XUANZHUANPENLINQINGXISHIJINRUXINGQINGXIDEBIANXING。XITONGZHONGYIBANBAOKUOZIDONGPEIYEXITONG、QINGXIQIANGTI、FEIYEHUISHOUXITONG。PENLINQINGXIZAIYIGEMIFENGDEGONGZUOQIANGNEIYICIWANCHENGHUAXUEQINGXI、QULIZISHUICHONGXI、XUANZHUANSHUAIGANDENGGUOCHENG，JIANSHAOLEZAIMEIYIBUQINGXIGUOCHENGZHONGYOUYURENWEICAOZUOYINSUZAOCHENGDEYINGXIANG。ZAIPENLINQINGXIZHONGYOUYUXUANZHUANHEPENLINDEXIAOGUO，SHIDEGUIPIANBIAOMIANDERONGYEGENGJIAJUNYUN，TONGSHI，JIECHUDAOGUIPIANBIAOMIANDERONGYEYONGYUANSHIXINXIANDE，ZHEIYANGJIUKEYIZUODAOTONGGUOGONGYISHIJIANSHEZHI，JINGQUEKONGZHIGUIPIANDEQINGXIFUSHIXIAOGUO，SHIXIANHENHAODEYIZHIXING。MIFENGDEGONGZUOQIANGKEYIGEJUEHUAXUEYEDEHUIFA，JIANSHAORONGYEDESUNHAOYIJIRONGYEZHENGQIDUIRENTIHEHUANJINGDEWEIHAI。GEXITONGFENBIEZHUYUBUTONGDEHUAXUESHIJI，ZAISHIYONGSHIDAODAPENKOUZHIQIANCAIHUNHE，SHIQIBAOCHIXINXIAN，YIFAHUIZUIDADEQIANLI，ZHEIYANGZAIQINGXISHIHUIFANYINGZUIKUAI。YONGN2PENSHISHIYETITONGGUOHENXIAODEPENKOU，SHIQIXINGCHENGHENXIDEWUZHUANG，ZHIGUIPIANBIAOMIANDADAOGENGHAODEQINGXIMUDE。
CIFANGFASHIYONGYUCHUQUYANGHUAMOHUOYOUJIWU。YINWEIHUAXUEWUZHIZAIGUIPIANBIAOMIANTINGLIUDESHIJIANBIJIAODUAN，DUIFANYINGXUYAOYIDINGSHIJIANDEQINGXIXIAOGUOBUHAO。ZAIPENXIGUOCHENGZHONGSUOSHIYONGDEHUAXUESHIJIHENSHAO，DUIKONGZHICHENGBENJIHUANJINGBAOHUYOULI。
4、SHUAXIQI
SHUAXIQIZHUYAOYONGYUGUIPIANPAOGUANGHOUDEQINGXI，KEYOUXIAODIQUCHUGUIPIANZHENGFANLIANGMIAN1μmYIJIGENGDADEKELI。ZHUYAOPEIZHIBAOKUOZHUANYONGSHUAXIQI、YOUHUADEHUAXUEQINGXIYEJICHAOCHUNSHUIHUOZHEIPA。ZAISHUIDONGLITIAOJIANXIA，KELIBEIXUANZHUANDEHAIMIANZHUANGSHUAZIGANCHU，QIJIEGOURUTU3SUOSHI。
![第二讲：四种常用的半导体硅片清洗设备及装置]( "第二讲：四种常用的半导体硅片清洗设备及装置")
▲TU3 GUIPIANSHUAXIZHUANGZHI
YIGEDIANXINGDEPOST—CMPQINGXIZHUANGZHIBAOKUOLIANGGESHUAXIXIANGHEYIGEZHAOSHENGBOQINGXIMOKUAI。ZAOQISHIYONGDENILONGMAOSHUAYIZAOCHENGGUIPIANDESUNSHANG，XIANZAIYIBANCAIYONGJUYIXICHUN(PVA)MAOSHUA，PVAMAOSHUAPEIHEQULIZISHUI，QIJIEGOURUTU4SUOSHI。
![第二讲：四种常用的半导体硅片清洗设备及装置]( "第二讲：四种常用的半导体硅片清洗设备及装置")
▲TU4 PVACAIZHISHUAXIQI