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石墨热场以及部件在单晶硅的制造中起着关键的载体作用

发布时间:2020-11-15 18:29:13 浏览:249次

    直拉单晶炉的热系统,也就是所谓的热场,是指为了熔化硅料,并使单晶生长保持在一定温度下进行的整个系统。


    热场一般包括(石墨材料)压环、保温盖、上中下保温罩、石墨坩埚(三瓣埚)、坩埚托杆、坩埚托盘、电极、加热器、导流筒、石墨螺栓,且为了防止漏硅,炉底、金属电极、托杆、都设置了保护板、保护套。


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